Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11035804 | System and method for x-ray imaging and classification of volume defects | Richard W. Solarz, Bosheng Zhang, Steven R. Lange | 2021-06-15 |
| 10959318 | X-ray metrology system with broadband laser produced plasma illuminator | Alexander N. Bykanov | 2021-03-23 |
| 10895541 | Systems and methods for combined x-ray reflectometry and photoelectron spectroscopy | Andrei V. Shchegrov, Alexander Kuznetsov | 2021-01-19 |
| 10893599 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Rudy F. Garcia, Frank Chilese | 2021-01-12 |