Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11156926 | Vacuum actuator containment for molecular contaminant and particle mitigation | Zefram Marks, Gildardo Delgado, Joseph Walsh, Matthew Bernard McLaughlin Hoffman | 2021-10-26 |
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Gildardo Delgado, Francis Chilese, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |
| 10893599 | Laser produced plasma light source having a target material coated on a cylindrically-symmetric element | Alexey Kuritsyn, Brian Ahr, Frank Chilese, Oleg Khodykin | 2021-01-12 |