Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10953441 | System and method for cleaning optical surfaces of an extreme ultraviolet optical system | Gildardo Delgado, Rudy F. Garcia, Mohammed Tahmassebpur, Salam Harb | 2021-03-23 |