PA

Phillip Atkins

KL Kla-Tencor: 1 patents #28 of 134Top 25%
Overall (2021): #302,428 of 548,734Top 60%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11156548 Measurement methodology of advanced nanostructures Manh Dang Nguyen, Alexander Kuznetsov, Liequan Lee, Natalia Malkova, Paul Aoyagi +3 more 2021-10-26