Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137350 | Mid-infrared spectroscopy for measurement of high aspect ratio structures | Shankar Krishnan, Guorong V. Zhuang | 2021-10-05 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |
| 11043239 | Magneto-optic Kerr effect metrology systems | Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong +7 more | 2021-06-22 |
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, Andrei Veldman, Kevin Peterlinz, Gregory Brady +1 more | 2021-04-06 |