Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137350 | Mid-infrared spectroscopy for measurement of high aspect ratio structures | David Y. Wang, Shankar Krishnan | 2021-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137350 | Mid-infrared spectroscopy for measurement of high aspect ratio structures | David Y. Wang, Shankar Krishnan | 2021-10-05 |