Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11137350 | Mid-infrared spectroscopy for measurement of high aspect ratio structures | David Y. Wang, Guorong V. Zhuang | 2021-10-05 |
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, David Y. Wang, Alexander Buettner, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |
| 11077418 | Solar thermochemical processing system and method | Robert S. Wegeng, Paul H. Humble, Steven Leith, Daniel R. Palo, Robert A. Dagle | 2021-08-03 |
| 11056366 | Sample transport device with integrated metrology | Giampietro Bieli, Robert Tas, Kevin O'Brien, Joshua Butler | 2021-07-06 |
| 11043239 | Magneto-optic Kerr effect metrology systems | Jun Wang, Yaolei Zheng, Chunxia Li, Changfei Yan, Lansheng Dong +7 more | 2021-06-22 |