Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Kerstin Purrucker, Kevin Peterlinz | 2021-09-14 |