Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11119050 | Methods and systems for measurement of thick films and high aspect ratio structures | Noam Sapiens, Shankar Krishnan, David Y. Wang, Alexander Buettner, Kerstin Purrucker | 2021-09-14 |
| 10969328 | Optical metrology tool equipped with modulated illumination sources | Andrei V. Shchegrov, Lawrence D. Rotter, David Y. Wang, Andrei Veldman, Gregory Brady +1 more | 2021-04-06 |