CY

Changfei Yan

KL Kla: 1 patents #57 of 232Top 25%
Overall (2021): #493,109 of 548,734Top 90%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11043239 Magneto-optic Kerr effect metrology systems Jun Wang, Yaolei Zheng, Chunxia Li, Lansheng Dong, Yang Zhou +7 more 2021-06-22