Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211253 | Atomic layer deposition and etch in a single plasma chamber for critical dimension control | Yoshie Kimura, Duming Zhang, Chen Xu, Ganesh Upadhyaya, Mitchell Brooks | 2021-12-28 |
| 11170997 | Atomic layer deposition and etch for reducing roughness | Naveed Ansari, Yoshie Kimura, Si Yi Li, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |
| 10950454 | Integrated atomic layer passivation in TCP etch chamber and in-situ etch-ALP method | Tom A. Kamp, Yoshie Kimura, Duming Zhang, Chen Xu, John Drewery +1 more | 2021-03-16 |