Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |
SL
Si Yi Li
Overall (2021): #257,249 of 548,734Top 50%
1
Patents 2021