Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Si Yi Li, Radhika Mani +5 more | 2021-11-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Naveed Ansari, Yoshie Kimura, Si Yi Li, Radhika Mani +5 more | 2021-11-09 |