Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Yoshie Kimura, Si Yi Li, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11170997 | Atomic layer deposition and etch for reducing roughness | Xiang Zhou, Yoshie Kimura, Si Yi Li, Kazi Sultana, Radhika Mani +5 more | 2021-11-09 |