RM

Radhika Mani

Lam Research: 1 patents #103 of 349Top 30%
Overall (2021): #294,262 of 548,734Top 55%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
11170997 Atomic layer deposition and etch for reducing roughness Xiang Zhou, Naveed Ansari, Yoshie Kimura, Si Yi Li, Kazi Sultana +5 more 2021-11-09