Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211286 | Airgap formation processes | Ashish Pal, Gaurav Thareja, Sankuei Lin, Ching-Mei Hsu, Ajay Bhatnagar +1 more | 2021-12-28 |
| 11101136 | Process window widening using coated parts in plasma etch processes | Dongqing Yang, Tien Fak Tan, Peter M. Hillman, Lala Zhu, Dmitry Lubomirsky +2 more | 2021-08-24 |
| 11004689 | Thermal silicon etch | Zihui Li, Rui Cheng, Anchuan Wang, Abhijit Basu Mallick | 2021-05-11 |
| 10943834 | Replacement contact process | Sankuei Lin, Ajay Bhatnagar | 2021-03-09 |
| 10886137 | Selective nitride removal | Prerna Goradia, Yogita Pareek, Geetika Bajaj, Robert Jan Visser | 2021-01-05 |