Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11075126 | Misregistration measurements using combined optical and electron beam technology | Roie Volkovich, Nadav Gutman | 2021-07-27 |
| 11054752 | Device metrology targets and methods | Eran Amit, Daniel Kandel, Dror Alumot, Amit Shaked | 2021-07-06 |
| 10943838 | Measurement of overlay error using device inspection system | Choon Hoong Hoo, Fangren Ji, Amnon Manassen, Antonio Mani, Allen Park +3 more | 2021-03-09 |