Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11093840 | Metrology and process control for semiconductor manufacturing | EITAN ROTHSTEIN, Ilya Rubinovich, Noam Tal, Barak Bringoltz, Yongha Kim +5 more | 2021-08-17 |
| 11054752 | Device metrology targets and methods | Eran Amit, Dror Alumot, Amit Shaked, Liran Yerushalmi | 2021-07-06 |
| 10916404 | TEM-based metrology method and system | Vladimir Machavariani, Michael Shifrin, Victor Kucherov, Igor Ziselman, Ronen Urenski +1 more | 2021-02-09 |