Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133147 | Charged particle ray device and cross-sectional shape estimation program | Toshiyuki Yokosuka, Kouichi Kurosawa, Hideyuki Kazumi, Chahn Lee | 2021-09-28 |
| 11062892 | Charged particle detector including a light-emitting section having lamination structure, charged particle beam device, and mass spectrometer | Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Makoto Suzuki | 2021-07-13 |
| 10984979 | Charged particle detector and charged particle beam apparatus | Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Shahedul Hoque, Shunsuke Mizutani +1 more | 2021-04-20 |
| 10984981 | Charged particle beam device having inspection scan direction based on scan with smaller dose | Hideki ITAI, Kumiko Shimizu, Wataru MORI, Shahedul Hoque | 2021-04-20 |
| 10903037 | Charged particle beam device | Keigo Kasuya, Shuhei Ishikawa, Kenji Tanimoto, Hideo Todokoro, Souichi Katagiri +2 more | 2021-01-26 |