Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152186 | Charged particle beam device | Wataru Yamane, Minoru Yamazaki, Yuko Sasaki, Takashi Doi | 2021-10-19 |
| 10991542 | Charged particle beam device | Ryota Watanabe, Yuko Sasaki, Kazunari Asao, Makoto Suzuki, Minoru Yamazaki | 2021-04-27 |
| 10984981 | Charged particle beam device having inspection scan direction based on scan with smaller dose | Hideki ITAI, Kumiko Shimizu, Hajime Kawano, Shahedul Hoque | 2021-04-20 |