Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984980 | Charged particle beam device for imaging vias inside trenches | Kei Sakai, Satoru Yamaguchi, Yasunori Takasugi, Kumiko Shimizu | 2021-04-20 |
| 10984981 | Charged particle beam device having inspection scan direction based on scan with smaller dose | Kumiko Shimizu, Wataru MORI, Hajime Kawano, Shahedul Hoque | 2021-04-20 |