Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139144 | Charged particle beam apparatus | Shunsuke Mizutani, Uki Ikeda, Makoto Suzuki | 2021-10-05 |
| 10984979 | Charged particle detector and charged particle beam apparatus | Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Hajime Kawano, Shunsuke Mizutani +1 more | 2021-04-20 |
| 10984981 | Charged particle beam device having inspection scan direction based on scan with smaller dose | Hideki ITAI, Kumiko Shimizu, Wataru MORI, Hajime Kawano | 2021-04-20 |