Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211225 | Charged particle beam control device | Shinichi Murakami, Makoto Suzuki, Akio Yamamoto, Wen Li | 2021-12-28 |
| 11139144 | Charged particle beam apparatus | Shahedul Hoque, Uki Ikeda, Makoto Suzuki | 2021-10-05 |
| 10991543 | Charged particle beam device | Yuuji KASAI, Minoru Yamazaki, Makoto Suzuki | 2021-04-27 |
| 10984979 | Charged particle detector and charged particle beam apparatus | Shin Imamura, Takashi Ohshima, Tomonobu Tsuchiya, Hajime Kawano, Shahedul Hoque +1 more | 2021-04-20 |
| 10903041 | Pattern measuring method, pattern measuring tool and computer readable medium | Uki Ikeda, Makoto Suzuki | 2021-01-26 |