Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139144 | Charged particle beam apparatus | Shunsuke Mizutani, Shahedul Hoque, Makoto Suzuki | 2021-10-05 |
| 10903041 | Pattern measuring method, pattern measuring tool and computer readable medium | Shunsuke Mizutani, Makoto Suzuki | 2021-01-26 |