Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10984980 | Charged particle beam device for imaging vias inside trenches | Kei Sakai, Satoru Yamaguchi, Hideki ITAI, Kumiko Shimizu | 2021-04-20 |
| 10976536 | Image-forming device, and dimension measurement device | Kei Sakai, Satoru Yamaguchi, Kazuyuki Hirao | 2021-04-13 |