Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211226 | Pattern cross-sectional shape estimation system and program | Toshiyuki Yokosuka, Hirohiko Kitsuki, Daisuke Bizen, Makoto Suzuki, Yusuke Abe +2 more | 2021-12-28 |
| 11133147 | Charged particle ray device and cross-sectional shape estimation program | Toshiyuki Yokosuka, Hajime Kawano, Kouichi Kurosawa, Chahn Lee | 2021-09-28 |
| 11011348 | Scanning electron microscope and sample observation method using scanning electron microscope | Daisuke Bizen, Natsuki Tsuno, Takafumi Miwa, Makoto Sakakibara, Toshiyuki Yokosuka | 2021-05-18 |