Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11211224 | Charged particle beam apparatus | Nobuhiro Okai, Tomoyasu Shojo, Naomasa Suzuki, Muneyuki Fukuda | 2021-12-28 |
| 11211226 | Pattern cross-sectional shape estimation system and program | Toshiyuki Yokosuka, Hirohiko Kitsuki, Makoto Suzuki, Yusuke Abe, Kenji Yasui +2 more | 2021-12-28 |
| 11164720 | Scanning electron microscope and calculation method for three-dimensional structure depth | Kenji Yasui, Mayuka Osaki, Makoto Suzuki, Hirohiko Kitsuki, Toshiyuki Yokosuka +1 more | 2021-11-02 |
| 11011348 | Scanning electron microscope and sample observation method using scanning electron microscope | Natsuki Tsuno, Takafumi Miwa, Makoto Sakakibara, Toshiyuki Yokosuka, Hideyuki Kazumi | 2021-05-18 |