Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11133147 | Charged particle ray device and cross-sectional shape estimation program | Toshiyuki Yokosuka, Hajime Kawano, Hideyuki Kazumi, Chahn Lee | 2021-09-28 |
| 10964508 | Charged-particle beam device | Yuzuru Mizuhara | 2021-03-30 |