| 11187838 |
Spectral filter for high-power fiber illumination sources |
Ohad Bachar, Avi Abramov, Amnon Manassen |
2021-11-30 |
| 11156846 |
High-brightness illumination source for optical metrology |
Amnon Manassen, Ohad Bachar, Avi Abramov |
2021-10-26 |
| 11118903 |
Efficient illumination shaping for scatterometry overlay |
Dmitry Gorelik |
2021-09-14 |
| 11073768 |
Metrology target for scanning metrology |
Amnon Manassen, Gilad Laredo, Yoel Feler, Mark Ghinovker, Vladimir Levinski |
2021-07-27 |
| 11060845 |
Polarization measurements of metrology targets and corresponding target designs |
Eran Amit, Barry Loevsky, Amnon Manassen, Nuriel Amir, Vladimir Levinski +1 more |
2021-07-13 |
| 10976249 |
Reflective pupil relay system |
Gregory Brady |
2021-04-13 |
| 10976562 |
Nano-structured non-polarizing beamsplitter |
Dmitry Gorelik, Ohad Bachar, Amnon Manassen, Daria Negri |
2021-04-13 |