| 11199778 |
Polymer brush adhesion promoter with UV cleavable linker |
Jing Guo, Bharat Kumar, Ekmini Anuja De Silva, Jennifer Church, Nelson Felix |
2021-12-14 |
| 11177130 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography |
Ekmini Anuja De Silva, Nelson Felix, Daniel A. Corliss, Rudy J. Wojtecki |
2021-11-16 |
| 11056418 |
Semiconductor microcooler |
Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2021-07-06 |
| 11049789 |
Semiconductor microcooler |
Donald F. Canaperi, Daniel A. Corliss, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka |
2021-06-29 |
| 11037786 |
Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography |
Ekmini Anuja De Silva, Nelson Felix, Daniel A. Corliss, Rudy J. Wojtecki |
2021-06-15 |
| 10998191 |
Graded hardmask interlayer for enhanced extreme ultraviolet performance |
Jennifer Church, Ekmini Anuja De Silva |
2021-05-04 |
| 10964541 |
Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography |
Martin Glodde |
2021-03-30 |
| 10937764 |
Three-dimensional microelectronic package with embedded cooling channels |
Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more |
2021-03-02 |
