Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177130 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki | 2021-11-16 |
| 11056418 | Semiconductor microcooler | Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2021-07-06 |
| 11049789 | Semiconductor microcooler | Donald F. Canaperi, Dario L. Goldfarb, Dinesh Gupta, Fee Li Lie, Kamal K. Sikka | 2021-06-29 |
| 11037786 | Patterning material film stack with metal-containing top coat for enhanced sensitivity in extreme ultraviolet (EUV) lithography | Ekmini Anuja De Silva, Dario L. Goldfarb, Nelson Felix, Rudy J. Wojtecki | 2021-06-15 |
| 10937764 | Three-dimensional microelectronic package with embedded cooling channels | Kamal K. Sikka, Fee Li Lie, Kevin R. Winstel, Ravi K. Bonam, Iqbal Rashid Saraf +2 more | 2021-03-02 |
| 10921715 | Semiconductor structure for optical validation | Derren N. Dunn, Michael A. Guillorn, Shawn P. Fetterolf | 2021-02-16 |
| 10921716 | Lithographic dose characterization | Christopher F. Robinson | 2021-02-16 |