Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194254 | Lithography process delay characterization and effective dose compensation | Luciana Meli, Ekmini Anuja De Silva, Cody J. Murray | 2021-12-07 |
| 10921716 | Lithographic dose characterization | Daniel A. Corliss | 2021-02-16 |