Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11194254 | Lithography process delay characterization and effective dose compensation | Christopher F. Robinson, Luciana Meli, Ekmini Anuja De Silva | 2021-12-07 |
| 11182722 | Cognitive system for automatic risk assessment, solution identification, and action enablement | Alex Richard Hubbard, Spyridon Skordas, Marc A. Bergendahl, Gauri Karve, Lawrence A. Clevenger | 2021-11-23 |
| 11067896 | Dynamic adjustment of post exposure bake during lithography utilizing real-time feedback for wafer exposure delay | Ekmini Anuja De Silva, Alex Richard Hubbard, Karen E. Petrillo, Nelson Felix | 2021-07-20 |