Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964541 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Dario L. Goldfarb | 2021-03-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10964541 | Method to improve adhesion of photoresist on silicon substrate for extreme ultraviolet and electron beam lithography | Dario L. Goldfarb | 2021-03-30 |