Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11188000 | Method and device for characterizing a mask for microlithography | Michael Kamp-Froese, Tobias Mueller | 2021-11-30 |
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Christoph Husemann, Lars Stoppe, Beat Marco Mout | 2021-08-03 |
| 11061331 | Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth | Dirk Hellweg, Renzo Capelli, Martin Dietzel | 2021-07-13 |