Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11092794 | Angularly-selective illumination | Michael Goegler, Thomas Ohrt | 2021-08-17 |
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Markus Koch, Christoph Husemann, Beat Marco Mout | 2021-08-03 |
| 11054305 | Method and device for beam analysis | Matthias Manger, Christoph Husemann, Matus Kalisky | 2021-07-06 |
| 10955653 | Autofocus with an angle-variable illumination | Thomas Ohrt, Christian Dietrich, Markus Sticker | 2021-03-23 |
| 10948705 | Device and method for capturing images | Alexander GAIDUK, Markus Sticker, Ralf Wolleschensky | 2021-03-16 |
| 10921573 | Determining the arrangement of a sample object by means of angle-selective illumination | Thomas Ohrt, Markus Sticker | 2021-02-16 |