Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099400 | Beam propagation camera and method for light beam analysis | — | 2021-08-24 |
| 11054305 | Method and device for beam analysis | Christoph Husemann, Matus Kalisky, Lars Stoppe | 2021-07-06 |
| 11048172 | Method for producing an illumination system for an EUV projection exposure system, and illumination system | Juergen Baier, Daniel Runde, Ulrich Mueller, Joerg Lichtenthaeler, André Orthen +3 more | 2021-06-29 |
| D914612 | Electrical junction box for motor diagnosis | Jan Andersson, Stephan Hühne, Michael Weigand | 2021-03-30 |