Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Markus Koch, Lars Stoppe, Beat Marco Mout | 2021-08-03 |
| 11054305 | Method and device for beam analysis | Matthias Manger, Matus Kalisky, Lars Stoppe | 2021-07-06 |