Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Ulrich Matejka, Thomas Scheruebl, Markus Koch, Christoph Husemann, Lars Stoppe | 2021-08-03 |