Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112702 | Device and method for characterizing a microlithographic mask | Sven Martin, Thomas Frank | 2021-09-07 |
| 11079338 | Method for detecting a structure of a lithography mask and device for carrying out the method | Thomas Scheruebl, Markus Koch, Christoph Husemann, Lars Stoppe, Beat Marco Mout | 2021-08-03 |
| 11029259 | Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type | Sven Martin | 2021-06-08 |