Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112702 | Device and method for characterizing a microlithographic mask | Thomas Frank, Ulrich Matejka | 2021-09-07 |
| 11029259 | Detection device for detecting a structure on an area portion of a lithography mask, and apparatus comprising a detection device of this type | Ulrich Matejka | 2021-06-08 |