Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11112702 | Device and method for characterizing a microlithographic mask | Sven Martin, Ulrich Matejka | 2021-09-07 |
| D929462 | Module | Stefan Weiss, Patrick Sturm, Thomas Ziegler | 2021-08-31 |
| 11079604 | Device for determining the exposure energy during the exposure of an element in an optical system, in particular for microlithography | — | 2021-08-03 |
| D925448 | Powercore module | Stefan Weiss, Patrick Sturm, Thomas Ziegler, Marco Lederer, Thomas Hunka +1 more | 2021-07-20 |
| 11059657 | Anti-evaporation cap cover for towelette dispenser container and assembly | — | 2021-07-13 |
| D921048 | Module | Stefan Weiss, Patrick Sturm, Thomas Ziegler | 2021-06-01 |
| 10946778 | Seat cushion assembly with pocket | Marc Herrmann, Ulrich Schneider, Otakar Pok, Stefan Gottauf | 2021-03-16 |