Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11079673 | Method and apparatus for repairing defects of a photolithographic mask for the EUV range | Hendrik Steigerwald | 2021-08-03 |
| 11061331 | Method for determining a structure-independent contribution of a lithography mask to a fluctuation of the linewidth | Markus Koch, Dirk Hellweg, Martin Dietzel | 2021-07-13 |