Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11188000 | Method and device for characterizing a mask for microlithography | Markus Koch, Tobias Mueller | 2021-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11188000 | Method and device for characterizing a mask for microlithography | Markus Koch, Tobias Mueller | 2021-11-30 |