Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770294 | Selective atomic layer deposition (ALD) of protective caps to enhance extreme ultra-violet (EUV) etch resistance | Lior Huli, Soo Doo Chae, Wan Jae Park | 2020-09-08 |
| 10734228 | Manufacturing methods to apply stress engineering to self-aligned multi-patterning (SAMP) processes | Eric Chih-Fang Liu, Akiteru Ko | 2020-08-04 |
| 10700009 | Ruthenium metal feature fill for interconnects | Kai-Hung Yu, Nicholas Joy, Eric Chih-Fang Liu, David S. H. Rosenthal, Masanobu Igeta +2 more | 2020-06-30 |
| 10580650 | Method for bottom-up formation of a film in a recessed feature | Kandabara Tapily, Nihar Mohanty | 2020-03-03 |