Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861739 | Method of patterning low-k materials using thermal decomposition materials | Yuki Kikuchi, Toshiharu Wada, Kaoru Maekawa | 2020-12-08 |
| 10790154 | Method of line cut by multi-color patterning technique | Eric Chih-Fang Liu | 2020-09-29 |
| 10734228 | Manufacturing methods to apply stress engineering to self-aligned multi-patterning (SAMP) processes | Eric Chih-Fang Liu, David L. O'Meara | 2020-08-04 |