TW

Toshiharu Wada

TL Tokyo Electron Limited: 1 patents #306 of 858Top 40%
📍 Rifu, NY: #2 of 3 inventorsTop 70%
Overall (2020): #239,237 of 565,922Top 45%
1
Patents 2020

Issued Patents 2020

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10861739 Method of patterning low-k materials using thermal decomposition materials Yuki Kikuchi, Kaoru Maekawa, Akiteru Ko 2020-12-08