Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861739 | Method of patterning low-k materials using thermal decomposition materials | Toshiharu Wada, Kaoru Maekawa, Akiteru Ko | 2020-12-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861739 | Method of patterning low-k materials using thermal decomposition materials | Toshiharu Wada, Kaoru Maekawa, Akiteru Ko | 2020-12-08 |