Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770294 | Selective atomic layer deposition (ALD) of protective caps to enhance extreme ultra-violet (EUV) etch resistance | David L. O'Meara, Soo Doo Chae, Wan Jae Park | 2020-09-08 |
| 10685857 | Dispense nozzle with a shielding device | Ronald Nasman | 2020-06-16 |