Issued Patents 2020
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10876976 | Apparatus and method for substrate inspection | Bo-Han Shih, Sheng-Hsiang Chuang, Hsu-Shui Liu, Jiun-Rong Pai | 2020-12-29 |
| 10872794 | Automatic in-line inspection system | Chien-Ko Liao, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Ya Hsun Hsueh | 2020-12-22 |
| 10861723 | EFEM robot auto teaching methodology | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai | 2020-12-08 |
| 10852704 | Semiconductor equipment management method, electronic device, and non-transitory computer readable storage medium | Sing-Tsung Li, Hsu-Shui Liu, Jiun-Rong Pai, Sheng-Hsiang Chuang, Chien-Ko Liao | 2020-12-01 |
| 10839507 | Defect offset correction | Chien-Ko Liao, Ya Hsun Hsueh, Sheng-Hsiang Chuang, Hsu-Shui Liu, Jiun-Rong Pai | 2020-11-17 |
| 10734206 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Sing-Tsung Li | 2020-08-04 |
| 10714364 | Apparatus and method for inspecting wafer carriers | Cheng-Kang Hu, Sheng-Hsiang Chuang, Jiun-Rong Pai, Hsu-Shui Liu | 2020-07-14 |
| 10665507 | Automated transfer and drying tool for process chamber | Tsung-Sheng Kuo, Hsu-Shui Liu, Jiun-Rong Pai, Yang-Ann Chu | 2020-05-26 |
| 10665489 | Integrated chip die carrier exchanger | Chien-Fa Lee, Hsu-Shui Liu, Jiun-Rong Pai, Pin-Yi Hsin, Patrick Lin | 2020-05-26 |
| 10643951 | Mini identification mark in die-less region of semiconductor wafer | Yue-Lin Peng, Cheng-Yi Huang, Fu-Jen Li | 2020-05-05 |
| 10559453 | Techniques for detecting micro-arcing occurring inside a semiconductor processing chamber | Feng-Kuang Wu, Chih-Kuo Chang, Hsu-Shui Liu, Jiun-Rong Pai, Sing-Tsung Li | 2020-02-11 |